E37 MEMS 5609 Electronic Materials Processing

This course covers "unit processes" for manufacturing semiconductor chips. Topics include: crystal growth and doping of wafers, oxidation and diffusion, ion implantation, deposition, etching, cleaning and lithography. Processes are described with key concepts derived from science and engineering and process integration is covered for devices such as transistors and light emitting diodes. Nanoprocessing concepts are highlighted in the end to provide students with practical and advanced knowledge of semiconductor manufacturing. Prerequisites: undergraduate engineering mathematics, materials science and basic electronics or instructor's permission.

Credit 3 units. EN: TU

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