E37 MEMS 5611 Principles and Methods of Micro and Nanofabrication

A hands-on introduction to the fundamentals of micro- and nanofabrication processes with emphasis on cleanroom practices. The physical principles of oxidation, optical lithography, thin film deposition, etching and metrology methods will be discussed, demonstrated and practiced. Students will be trained in cleanroom concepts and safety protocols. Sequential microfabrication processes involved in the manufacture of microelectronic and photonic devices will be shown. Training in imaging and characterization of micro- and nanostructures will be provided. Prerequisite: graduate or senior standing or permission of the instructor.

Credit 3 units. EN: TU

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