E37 MEMS 5801 Micro-Electro-Mechanical Systems I

Introduction to MEMS: Microelectromechanical systems (MEMS) are ubiquitous in chemical, biomedical and industrial (e.g., automotive, aerospace, printing) applications. This course covers important topics in MEMS design, micro-/nanofabrication, and their implementation in real-world devices. The course includes discussion of fabrication and measurement technologies (e.g., physical/chemical deposition, lithography, wet/dry etching, and packaging), as well as application of MEMS theory to design/fabrication of devices in a cleanroom. Lectures cover specific processes and how those processes enable the structures needed for accelerometers, gyros, FR filters, digital mirrors, microfluidics, micro total-analysis systems, biomedical implants, etc. The laboratory component allows students to investigate those processes first-hand by fabricating simple MEMS devices.

Credit 3 units. EN: TU

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